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SiEPIC_EBeam_PDK: process design kit (PDK) for fabrication using electron beam lithography, and a library silicon photonics components.
Developed as part of the SiEPIC program, the SiEPIC EBeam PDK is a process design kit (PDK) for fabrication using electron beam lithography, and a library silicon photonics components.
Instruction on design, layout, fabrication, test, data analysis for silicon photonics provided in the edX course: Silicon Photonics Design, Fabrication and Data Analysis and textbook Silicon Photonics Design: From Devices to Systems by Lukas Chrostowski and Michael Hochberg.
Details are provided in the Wiki page: Installation instructions. KLayout's package manager is used for both downloading and installing the package into the KLayout Application.
The PDK may also be installed using pip install siepic_ebeam_pdk
FAQs
SiEPIC_EBeam_PDK: process design kit (PDK) for fabrication using electron beam lithography, and a library silicon photonics components.
We found that siepic-ebeam-pdk demonstrated a healthy version release cadence and project activity because the last version was released less than a year ago. It has 1 open source maintainer collaborating on the project.
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